Applied Science and Convergence Technology

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Fig. 2.

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Fig. 2. (Color online) The measured ion energy distribution incident on the substrate with and without the mesh grid according to the change of (a) input power and (b) process pressure.
Applied Science and Convergence Technology 2019;28:41-5 https://doi.org/10.5757/ASCT.2019.28.3.41
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