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Fig. 4.
Fig. 4. (a) Change in the sheet resistance and (b) ID/IG ratio determined from the Raman spectrum with a change in the input power from 10 to 50 W under 10 mTorr of Cl2 for an exposure time of 15 s.
Applied Science and Convergence Technology 2019;28:41~45 https://doi.org/10.5757/ASCT.2019.28.3.41
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