Applied Science and Convergence Technology

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Fig. 5.

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Fig. 5. (a) The reduction in the sheet resistance and (b) the ID/IG ratio according to the exposure time under 10 mTorr of Cl2 at 20 W input power.
Applied Science and Convergence Technology 2019;28:41-5 https://doi.org/10.5757/ASCT.2019.28.3.41
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