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Preparation of TiO2 Nanotube Arrays from Thin Film Grown by RF Sputtering
Appl. Sci. Converg. Technol. 2018;27:105-108
Published online September 30, 2018;
© 2018 The Korean Vacuum Society.

Chang Woo Kim*

Department of Graphic Arts Information Engineering, College of Engineering, Pukyong National University, Busan 48513, Republic of Korea
Correspondence to: E-mail:
Received September 10, 2018; Revised September 13, 2018; Accepted September 17, 2018.
Transparent TiO2 nanotube arrays are successfully prepared by a two-step approach involving electrochemical anodization and RF magnetron sputtering. First, a Ti film is deposited on an FTO substrate by RF magnetron sputtering at room temperature. The morphologies of the Ti film are controlled by the working distance, Ar flow, and DC power. Second, an anodization treatment is electrochemically performed for the formation of nanotube arrays from the deposited Ti film, followed by post-annealing treatment in air for the formation of TiO2 crystallization. The back side of the crystallized TiO2 nanotube arrays is illuminated with solar light to characterize the photoelectrochemical reaction, and their photoelectrochemical properties are investigated. This work provides information on application of a thin film deposited by RF sputtering in the field of photoelectrochemical water splitting.
Keywords : Sputtering, Thin film, Nanotube, Photoelectrode

September 2018, 27 (5)