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Vanadium Oxide Microbolometer Using ZnO Sandwich Layer
Applied Science and Convergence Technology 2015;24:178-183
Published online September 30, 2015
© 2015 Korean Vacuum Society.

Myung-Soo Hana, Dae Hyeon Kima, Hang Ju Koa, and Heetae Kimb*

aMedical Photonics Research Center, Korea Photonics Technology Institute, Gwangju 61007, Korea
bRare Isotope Science Project, Institute for Basic Science, Daejeon 34047, Korea
Correspondence to: Heetae Kim
Received September 24, 2015; Accepted September 30, 2015.
cc This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Optical, electrical and structural properties of VOx/ZnO/VOx thin film are studied. The VOx/ZnO/VOx multilayer is deposited by using a radio frequency (RF) sputtering system. The VOx/ZnO/VOx thin film shows the high temperature coefficient of resistance (TCR) of −3.12%/°C and the low sheet resistance of about 80 kΩ/sq at room temperature. The responsivity and detectivity of the bolometer are measured as a function of modulation frequency.
Keywords : IR detector, Microbolometer, Oxygen annealing, TCR

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