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Research Paper

Applied Science and Convergence Technology 2018; 27(6): 120-125

Published online November 30, 2018

https://doi.org/10.5757/ASCT.2018.27.6.120

Copyright © The Korean Vacuum Society.

Vacuum Diagnosis and Testing of a Dirty Thermal Vacuum Chamber

Taeil Chunga,*, Jong Yeon Limb, Sangbaek Kangc, Yongho Yooa, and Hyu-Soung Shina

aDepartment of Future Technology and Convergence Research, Korea Institute of Civil Engineering and Building Technology, Gyeonggi-do 10223, Republic of Korea, bSemiconductor Integrated Metrology Team, Korea Research Institute of Standards and Science, Daejeon, 34113, Republic of Korea, cR&D Center, VACSCO CO., LTD., Chungcheongbuk-do 28185, Republic of Korea

Correspondence to:*Corresponding author: E-mail: taeilchung@kict.re.kr

Received: September 27, 2018; Revised: October 25, 2018; Accepted: October 29, 2018

Abstract

The Korea Institute of Civil Engineering and Building Technology is currently developing a planetary surface environment simulator for the Moon and Mars. Known as a dirty thermal vacuum chamber (DTVC), this simulator contains a large volume of soil that undergoes extensive testing using special equipment. The construction of the DTVC started in 2017 and is expected to be completed by the end of 2019. The DTVC is a large vacuum chamber with an inner space measuring 4.70 m (W) × 4.70 m (H) × 4.65 m (L). The goal of the first construction stage was to achieve a target pressure of 5 × 10−8 mbar without soil. After assembling the chamber body and the pumping system, we attempted to reduce the leakage with the help of pressure buildup analysis, helium leak testing, and residual gas analysis. After vacuum diagnosis of the chamber, the overall leakage decreased and the target pressure was achieved in approximately 93 hours after the pumping commenced.

Keywords: Dirty thermal vacuum chamber, Vacuum diagnosis, Leak detection, Pressure buildup, Residual gas analysis, Helium leak detection

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