eISSN 2288-6559
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Joo YW, Park YH, Noh HS, Kim JK, Lee JW.
Dry Etching of Flexible Polycarbonate and PMMA in O₂/SF₆/CH₄ Discharges
. Applied Science and Convergence Technology 2009;18:85-91.
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eISSN 2288-6559
