eISSN 2288-6559
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Cha JH, Kim SW, , Lee∗ HJ.
A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters
. Applied Science and Convergence Technology 2021;30:92-94.
https://doi.org/10.5757/ASCT.2021.30.3.92
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eISSN 2288-6559
