Download to citation(s)

Koo∗ M. Effect of Temperature on the Reaction Products of Silicon in Fluorine-Based Plasmas. Applied Science and Convergence Technology 2024;33:171-175.
https://doi.org/10.5757/ASCT.2024.33.6.171

Export type	* Please select a format and type blew.
Format	EndNote Reference Manager RIS Format Plain Text