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Cited by CrossRef (1)

  1. Dezhi Xiao, Qingdong Ruan, Liangliang Liu, Jie Shen, Cheng Cheng, Paul K. Chu. Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation. Surface and Coatings Technology 2020;400:126252
    https://doi.org/10.1016/j.surfcoat.2020.126252