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  1. Atefeh Fathzadeh, Philippe Bezard, Maxime Darnon, Inge Manders, Thierry Conard, Ilse Hoflijk, Frederic Lazzarino, Stefan de Gendt. Transient-assisted plasma etching (TAPE): Concept, mechanism, and prospects. 2024;42
    https://doi.org/10.1116/6.0003380