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Kim DS, Kim JE, Gill YJ, Jang YJ, Kim YE, Kim KN, Yeom GY, , Kim DW.  Anisotropic/Isotropic Atomic Layer Etching of Metals.  Applied Science and Convergence Technology 2020;29:41-49.  https://doi.org/10.5757/ASCT.2020.29.3.041