Applied Science and Convergence Technology

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Choi D, Lee YH, Kim KH, , Choi S. 3-D Numerical Simulation and Optical Diagnosis of Temperature Distribution Inside a Chamber of Hot Filament Chemical Vapor Deposition. Applied Science and Convergence Technology 2023;32:7-11. https://doi.org/10.5757/ASCT.2023.32.1.7

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