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March, 2020, Vol.29 No 2
For Case (3), to increase accuracy in calculating the power induced to the plasma chamber, the capacitive electric field is calculated besides the usual inductive electric field; the impedance of the system is calculated from a field definition based on Poynting’s theorem. Consequently, the Case (3) in which the most power is transferred represents the highest numerical value of the electron density in all three cases. 2020; 29(2): 23-27
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< PreviousApplied Science and Convergence Technology 2020; 29(2): 23~39Next >
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Inductively Coupled Plasma Discharge Simulation for the Semiconductor Process Considering Impedance Calculation in 3D Asymmetric Structure
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bPlasma Technology Research Center, National Fusion Research Institute, Gunsan 54004, Republic of Korea ASCT 2020; 29(2): 23-27 Keywords : Plasma, Asymmetric 3D inductively coupled plasma, Coil analysis, Impedance -
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