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March, 2020, Vol.29 No 2

For Case (3), to increase accuracy in calculating the power induced to the plasma chamber, the capacitive electric field is calculated besides the usual inductive electric field; the impedance of the system is calculated from a field definition based on Poynting’s theorem. Consequently, the Case (3) in which the most power is transferred represents the highest numerical value of the electron density in all three cases. 2020; 29(2): 23-27


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July, 2022, Vol.31 No 4

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