ASCT로고
eISSN 2288-6559
Fig. 3. Gas flow velocity profile at the cutting plane of vertical gas inlet nozzles.
Applied Science and Convergence Technology 2017;26:189~194 https://doi.org/10.5757/ASCT.2017.26.6.189
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd