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Table. 2.

Summary of reported ALE of metals.

Materials Direction Reaction Removal Process Temperature(°C) EPC (Å/cycle) Time of cycle Reference
Co Anisotropy O2 Formic acid 80 28 350 sec 17
Isotropy Cl2 hfacH 140 2 95 sec 32
Fe Anisotropy O2 Formic acid 80 42 350 sec 17
Pd 12 350 sec
Pt 5 350 sec
Cr Anisotropy O2 Cl2 RT 1.1 40 sec 28
W Isotropy O2 WF6 300 6.3 320 sec 33
O2/O3 BC13 → HF 207 2.5 325 sec 31
Anisotropy NF3 O2 RT 2.6 40 sec 29
Cl2 Ar 60 2.1 25 sec 26
Cu Isotropy O2 Hfac 275 0.9 11 min 34
Anisotropy Acetic acid O2-GCIB RT 0.7 92 sec 30
TiN Isotropy O3 HF 250 0.15 64 sec 18
AIN Isotropy HF Sn(acac)2 275 0.36 280 sec 19
Applied Science and Convergence Technology 2020;29:41~49 https://doi.org/10.5757/ASCT.2020.29.3.041
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