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Fig. 3.
Fig. 3. (a) Binding energies between atoms when a reactant was chemisorbed on the surface. The binding energy between the chemical and the top atomic layer of the substrate is represented as Ea, the binding energy of the layer immediately below as Es, and the binding energy in the bulk layer as Eb. (b) Etch per cycle (EPC), according to the change of the desorption energy in the cyclic process. EPC according to the change of (c) the adsorption dose and (d) the desorption ion dose in the cyclic process.
Applied Science and Convergence Technology 2020;29:41~49
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