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Fig. 4.
Fig. 4. ALE ideality percentage as a function of Ar+ ion desorption time for different ion energies in the ALE process of Ta. Reproduced with permission from [27], Copyright 2018, AIP Publishing.
Applied Science and Convergence Technology 2020;29:41~49 https://doi.org/10.5757/ASCT.2020.29.3.041
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