eISSN 2288-6559
Fig. 4.
Fig. 4. ALE ideality percentage as a function of Ar+ ion desorption time for different ion energies in the ALE process of Ta. Reproduced with permission from [27], Copyright 2018, AIP Publishing.
Applied Science and Convergence Technology 2020;29:41~49
© Appl. Sci. Converg. Technol.

Copyright © The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd