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Fig. 6.
Fig. 6. Total etch depth and EPC, measured as a function of the number of cycles by using physical (O/Cl radical adsorption and Ar+ ion desorption) Cr ALE and chemical (O radical adsorption and Cl+ ion desorption) Cr ALE. Reproduced with permission from [28], Copyright 2018, IOP Publishing.
Applied Science and Convergence Technology 2020;29:41~49 https://doi.org/10.5757/ASCT.2020.29.3.041
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