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Fig. 7.
Fig. 7. EPC of W ALE as a function of (a) F radical adsorption time and (b) O+ ion desorption time. (c, d) Surface roughness after F radical adsorption and after the O+ ion irradiation as a function of O+ ion desorption, during the ALE of W. Reproduced with permission from [29], Copyright 2019, John Wiley and Sons.
Applied Science and Convergence Technology 2020;29:41~49
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