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Fig. 8.
Fig. 8. (a) Total etch depth as a function of ALE cycles and (b) EPC of different metal oxide thickness/cycle for anisotropic ALE of Co, Fe, Pd, Pt, and Cu, using O2 plasma and formic acid. Reproduced with permission from [17], Copyright 2017, AIP Publishing.
Applied Science and Convergence Technology 2020;29:41~49
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