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Fig. 12.
Fig. 12. Thermal W ALE by “oxidation-conversion-fluorination.” W thickness change measured according to the change in the number of half-cycles using O2/O3, BCl3, and HF at 200 °C. Reproduced with permission from [31], Copyright 2017, American Chemical Society.
Applied Science and Convergence Technology 2020;29:41~49
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