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Fig. 14.
Fig. 14. Change of TiN thickness and other materials (SiO2 and Si3N4) according to the number of thermal ALE cycles. Reproduced with permission from [18], Copyright 2017, American Chemical Society.
Applied Science and Convergence Technology 2020;29:41~49 https://doi.org/10.5757/ASCT.2020.29.3.041
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