Applied Science and Convergence Technology

Table 1

Comparison according to the generation method of thermal plasma

Type of plasma generation	Advantages	Weakness
DC thermal plasma (non-transferred type)	Easy operating
	High thermal efficiency (> 60%)	Contamination from electrode erosion
	Low flow rate of plasma forming gas	Limitation of plasma forming gas composition (no oxidizing gas)
	Low cost processing
	Compact system	Limitation of electrode lifetime
	Atmospheric pressure discharge
DC thermal plasma (transferred type)	Effective heat transfer by using high enthalpy arc
	High thermal efficiency (> 60%)
	Low flow rate of plasma forming gas	Requirement of electric conductive target material as anode
	Low cost processing	Difficult to enhance uniform heat transfer inside of crucible
	Compact system
	Atmospheric pressure discharge
RF thermal plasma (Inductively coupled plasma)	No contamination by electrode material and arc gas	Sensitive matching system for discharging
	Relatively low thermal efficiency (< 60%)	High flow rate of plasma forming gas
	Discharge under low pressure (vacuum system)	Relatively high cost processing

Applied Science and Convergence Technology 2020;29:117~123 https://doi.org/10.5757/ASCT.2020.29.5.117