Applied Science and Convergence Technology

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Table 1

Set of gas reactions in Ar plasma.

Index	Reaction		Reference
1	e + Ar → Ar + e	-	[8]
2	e + Ar → Ars + e	11.55	[8]
3	e + Ar → Ars + e	13	[8]
4	e + Ar → Ars + e	14	[8]
5	e + Ar → Ars + e + e	15.7	[8]
6	Ars + Ars → Ar + Ars + e	-	[9]
7	Ar + Ars → Ar + Ar	-	[9]

Applied Science and Convergence Technology 2020;29:157~161 https://doi.org/10.5757/ASCT.2020.29.6.157

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