Fig. 4. Plasma properties computed for Druyvesteyn EEDF at 10 mTorr and gas flow rate of 100 sccm, and absorbed power of 570 W; (a) electron density (1/m³), (b) electron temperature (eV), (c) plasma potential (V), and (d) power density (W/m³).

Applied Science and Convergence Technology 2020;29:157~161 https://doi.org/10.5757/ASCT.2020.29.6.157

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