Fig. 5. Plasma properties distribution of electron density, electron temperature, plasma potential, power density with (a) Maxwell EEDF, (b) Druyvesteyn EEDF, and (c) Boltzmann EEDF.

Applied Science and Convergence Technology 2020;29:157~161 https://doi.org/10.5757/ASCT.2020.29.6.157

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