Fig. 6. Radial plasma properties profiles (z = 9 cm). Distributions of (a) electron density, (b) electric potential, (c) Ar density, and (d) Ar+ density with pressures (1, 10, and 25 mTorr).

Applied Science and Convergence Technology 2020;29:157~161 https://doi.org/10.5757/ASCT.2020.29.6.157

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