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Fig. 5.
Fig. 5. Applied voltage and discharge current waveforms in the case of the helium discharge with a fixed input voltage of 1.25 kV and frequency of 10 kHz. (a) 3.6, (b) 10.7, (c) 20.2, and (d) 31.1 Torr.
Applied Science and Convergence Technology 2020;29:170~175 https://doi.org/10.5757/ASCT.2020.29.6.170
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