Fig. 11. Applied voltage and discharge current waveforms in the case of the argon and helium mixture discharge at different gas ratios with a total gas flow rate of 0.20 slm, input voltage of 1.25 kV, frequency of 10.0 kHz, and pressure of 12.1 Torr [argon:helium = (a) 10:0, (b) 8:2, (c) 6:4, (d) 4:6, (e) 2:8, and (f) 0:10].

Applied Science and Convergence Technology 2020;29:170~175 https://doi.org/10.5757/ASCT.2020.29.6.170

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