Fig. 3. Two simulations of 13 keV Ar+ extraction with varying plasma meniscus.(a) Beam extraction from the filament discharge source (concave meniscus). (b) Beam extraction from the RF ion source (cross-over meniscus).

Applied Science and Convergence Technology 2021;30:92~94 https://doi.org/10.5757/ASCT.2021.30.3.92

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