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Fig. 3.
Fig. 3. (a) C, (b) CF, (c) CF2, (d) CF3, and (e) F radical densities measured by a QMS(SRS-200) in the C4F8, C7F14, and C7F8 plasmas.
Applied Science and Convergence Technology 2021;30:102~106 https://doi.org/10.5757/ASCT.2021.30.4.102
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