Fig. 4. XPS spectra of photoelectron C 1s peaks of the fluorocarbon film de-posited in the (a) C₄F₈, (b) C₇F₁₄, and (c) C₇F₈ plasmas.

Applied Science and Convergence Technology 2021;30:102~106 https://doi.org/10.5757/ASCT.2021.30.4.102

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