ASCT로고
eISSN 2288-6559
Fig. 4.
Fig. 4. XPS spectra of photoelectron C 1s peaks of the fluorocarbon film de-posited in the (a) C4F8, (b) C7F14, and (c) C7F8 plasmas.
Applied Science and Convergence Technology 2021;30:102~106 https://doi.org/10.5757/ASCT.2021.30.4.102
© Appl. Sci. Converg. Technol.

Copyright © The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd