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Fig. 5.
Fig. 5.
(a) C, (b) CF, (c) CF
2
, (d) CF
3
, and (e) F radical densities measured as a function of electron impact energy using a QMS (PSM) after C
4
F
8
, C
7
F
14
, and C
7
F
8
are decomposed by the electron-emitting source.
Applied Science and Convergence Technology 2021;30:102~106
https://doi.org/10.5757/ASCT.2021.30.4.102
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