Fig. 5. (a) C, (b) CF, (c) CF₂, (d) CF₃, and (e) F radical densities measured as a function of electron impact energy using a QMS (PSM) after C₄F₈, C₇F₁₄, and C₇F₈ are decomposed by the electron-emitting source.

Applied Science and Convergence Technology 2021;30:102~106 https://doi.org/10.5757/ASCT.2021.30.4.102

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