Fig. 1. (a) Optical image of graphene contacted with Ti electrodes on SiO₂/Si substrate. (b) Optical image of PMMA mask on graphene-Ti electrodes on SiO₂/Si substrate. The red dashed area denotes an opened PMMA mask window. (c) Optical image of graphene contacted with Ti electrodes on SiO₂/Si substrate after oxygen plasma etching and PMMA mask removal.

Applied Science and Convergence Technology 2021;30:183~185 https://doi.org/10.5757/ASCT.2021.30.6.183

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