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Fig. 3.
Fig. 3. Spatial (a)-(c) radical densities, (d)-(f) electron densities, and (g) self-bias voltage at various power levels: 100, 200, and 300 W at 30 mTorr and Ar:C4F8 = 65:6.
Applied Science and Convergence Technology 2021;30:176~182 https://doi.org/10.5757/ASCT.2021.30.6.176
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