Fig. 5. Spatial (a)-(c) radical densities, (d)-(f) electron densities, and (g) self-bias voltage at different pressure levels: 30, 70, and 100 mTorr, applied power of 300 W, and a gas ratio of Ar:C₄F₈ = 65:6.

Applied Science and Convergence Technology 2021;30:176~182 https://doi.org/10.5757/ASCT.2021.30.6.176

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