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Fig. 1.
Fig. 1. Experimental system layout: 1) Gas inlet; 2) Target metal; 3) Metallic target plate; 4) Radial triple probe; 5) Vacuum system; 6) Sample holder; 7) Microwave system.
Applied Science and Convergence Technology 2022;31:46~50 https://doi.org/10.5757/ASCT.2022.31.2.46
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