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Table. 1.

Classification of CVD methods based on operating conditions.

Parameter CVD technique
Temperature Thermal CVD
Low-temperature CVD
Substrate heating Hot wall CVD
Cold wall CVD
Pressure Low-pressure CVD
Atmospheric pressure CVD
Ultrahigh vacuum CVD
Additional energy sources PECVD
Microwave plasma-assisted CVD
Radiofrequency CVD
Applied Science and Convergence Technology 2022;31:63~70 https://doi.org/10.5757/ASCT.2022.31.3.63
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