Applied Science and Convergence Technology

Table 2

Summary of liquid precursors in low-temperature CVD graphene growth.

No.	Synthesis method	Growth temp (°C)	Carbon source	Catalyst/Substrate	Graphene type	Ref.
1	Oxygen-free APCVD	400	Benzene or pyridine	Cu interconnects	Multilayer	[35]
2	Direct CVD	350, 450	Methanol, propylene	TiO₂	Monolayer or double layer	[32]
3	CVD	464	Ethanol	SiO₂/Si, Ni catalyst	Multilayer	[30]
4	APCVD	300	Pyridine	Cu foil	N-doped graphene	[31]
5	PECVD	RT	1,2-dichlorobenzene (and other aromatic precursors)	Ni, Cu	Graphene nanostripes	[33]
6	Cold wall PECVD	100	Benzene	Ni catalyst on SiO₂/Si	N-doped graphene	[36]
7	Cold wall CVD	400	Benzene	Ni catalyst on SiO₂/Si	Large area bilayer graphene	[34]
8	CVD	500	Benzene	Cu foil	Monolayer	[29]

Applied Science and Convergence Technology 2022;31:63~70 https://doi.org/10.5757/ASCT.2022.31.3.63