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Table. 2.

Summary of liquid precursors in low-temperature CVD graphene growth.

No. Synthesis method Growth temp (°C) Carbon source Catalyst/Substrate Graphene type Ref.
1 Oxygen-free
APCVD
400 Benzene or pyridine Cu interconnects Multilayer [35]
2 Direct CVD 350, 450 Methanol, propylene TiO2 Monolayer or double layer [32]
3 CVD 464 Ethanol SiO2/Si, Ni catalyst Multilayer [30]
4 APCVD 300 Pyridine Cu foil N-doped graphene [31]
5 PECVD RT 1,2-dichlorobenzene (and other aromatic precursors) Ni, Cu Graphene nanostripes [33]
6 Cold wall
PECVD
100 Benzene Ni catalyst on SiO2/Si N-doped graphene [36]
7 Cold wall CVD 400 Benzene Ni catalyst on SiO2/Si Large area bilayer graphene [34]
8 CVD 500 Benzene Cu foil Monolayer [29]
Applied Science and Convergence Technology 2022;31:63~70 https://doi.org/10.5757/ASCT.2022.31.3.63
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