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Table. 4.

Summary of gaseous precursors in low-temperature CVD graphene growth.

No. Synthesis method Growth temp (°C) Carbon source Substrate/Catalyst Graphene type Ref.
1 PECVD 400-550 Methane Glass and FTO vertically oriented (3D) graphene nanostructures [49]
2 PECVD 500 Acetylene SiO2/Si wafers, Ni/Cu catalysts Few to monolayer [61]
3 ICP-CVD 450 Acetylene Ni/SiO2 Multilayer [62]
4 CVD 150, 400 Methane Eagle glass, polyethylene terephthalate, and Ti catalyst Micrometer scale monolayer [54]
5 Plasma assisted thermal CVD 100 Methane Ti buffered PET and polydimethylsiloxane (PDMS) substrate Monolayer [56]
6 Microwave plasma CVD 300 Methane and CO2 Quartz, glass Large area, few-layer [59]
7 PECVD 500 Methane VO2 Vertically erected nanowalls [57]
8 PECVD 350 Methane, acetylene NiO nanosheets Vertical graphene nanosheets [55]
9 Microwave plasma CVD 125 Methane and CO2 N-type Si Large area graphene [70]
10 Forced convection CVD <400 Methane Cu foil Monolayer [58]
11 Very high frequency- Hot wire cell PECVD 275 Methane Ag thin film on a corning glass substrate Flakes [71]
12 ICP-CVD 300 Methane SiO2/Si Cu film catalyst Bilayer [72]
13 CVD 450 Acetylene SiO2/Si Ni/Au catalyst Few layer [63]
14 CVD 350-500 Acetylene Porous Si Graphene carbon nanocomposites [65]
15 Microwave assisted CVD <300 Methane Si wafer Vertically aligned graphene [50]
16 Cold wall CVD 450 Acetylene Ni-Au catalysts on SiO2/Si wafers Few layer curved graphene films [64]
17 Hot wire CVD 450 Methane W nanoparticles coated c-Si and quartz Large area graphene nanoplatelets [60]
18 PECVD 450 Ethylene Ni catalyst on Al/Si Vertical graphene nanosheets [67]
19 PECVD 400 Methane Carbon fibers Vertical graphene [51]
20 PECVD 50 Methane SiO2 N-graphene nanowalls [73]
21 cold-wall ICPCVD 450 Acetylene Ni/Au catalyst on SiO2/Si monolayer [66]
22 PECVD 100 Methane Electroplated Cu thin film on Cu/Ti/Silicon nitride/polyimide Bilayer [53]
23 PECVD 500 Acetylene Ni alloy catalyst with 1wt% Au and 1wt% Cu on SiO2/Si wafers Monolayer [69]
24 PECVD 160 Methane Cu ink deposited on PI Monolayer, bilayer [52]
25 CVD 400-550 Ethylene Ni2C/Ni(100) Monolayer [68]
Applied Science and Convergence Technology 2022;31:63~70 https://doi.org/10.5757/ASCT.2022.31.3.63
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