Applied Science and Convergence Technology

Table 4

Summary of gaseous precursors in low-temperature CVD graphene growth.

No.	Synthesis method	Growth temp (°C)	Carbon source	Substrate/Catalyst	Graphene type	Ref.
1	PECVD	400-550	Methane	Glass and FTO	vertically oriented (3D) graphene nanostructures	[49]
2	PECVD	500	Acetylene	SiO₂/Si wafers, Ni/Cu catalysts	Few to monolayer	[61]
3	ICP-CVD	450	Acetylene	Ni/SiO₂	Multilayer	[62]
4	CVD	150, 400	Methane	Eagle glass, polyethylene terephthalate, and Ti catalyst	Micrometer scale monolayer	[54]
5	Plasma assisted thermal CVD	100	Methane	Ti buffered PET and polydimethylsiloxane (PDMS) substrate	Monolayer	[56]
6	Microwave plasma CVD	300	Methane and CO₂	Quartz, glass	Large area, few-layer	[59]
7	PECVD	500	Methane	VO₂	Vertically erected nanowalls	[57]
8	PECVD	350	Methane, acetylene	NiO nanosheets	Vertical graphene nanosheets	[55]
9	Microwave plasma CVD	125	Methane and CO₂	N-type Si	Large area graphene	[70]
10	Forced convection CVD	<400	Methane	Cu foil	Monolayer	[58]
11	Very high frequency- Hot wire cell PECVD	275	Methane	Ag thin film on a corning glass substrate	Flakes	[71]
12	ICP-CVD	300	Methane	SiO₂/Si Cu film catalyst	Bilayer	[72]
13	CVD	450	Acetylene	SiO₂/Si Ni/Au catalyst	Few layer	[63]
14	CVD	350-500	Acetylene	Porous Si	Graphene carbon nanocomposites	[65]
15	Microwave assisted CVD	<300	Methane	Si wafer	Vertically aligned graphene	[50]
16	Cold wall CVD	450	Acetylene	Ni-Au catalysts on SiO₂/Si wafers	Few layer curved graphene films	[64]
17	Hot wire CVD	450	Methane	W nanoparticles coated c-Si and quartz	Large area graphene nanoplatelets	[60]
18	PECVD	450	Ethylene	Ni catalyst on Al/Si	Vertical graphene nanosheets	[67]
19	PECVD	400	Methane	Carbon fibers	Vertical graphene	[51]
20	PECVD	50	Methane	SiO₂	N-graphene nanowalls	[73]
21	cold-wall ICPCVD	450	Acetylene	Ni/Au catalyst on SiO₂/Si	monolayer	[66]
22	PECVD	100	Methane	Electroplated Cu thin film on Cu/Ti/Silicon nitride/polyimide	Bilayer	[53]
23	PECVD	500	Acetylene	Ni alloy catalyst with 1wt% Au and 1wt% Cu on SiO₂/Si wafers	Monolayer	[69]
24	PECVD	160	Methane	Cu ink deposited on PI	Monolayer, bilayer	[52]
25	CVD	400-550	Ethylene	Ni₂C/Ni(100)	Monolayer	[68]

Applied Science and Convergence Technology 2022;31:63~70 https://doi.org/10.5757/ASCT.2022.31.3.63