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Fig. 5.
Fig. 5. Schematic plan view of a beamline that requires X-rays strictly focused down to the order of submicrometer or tens of nm in size for the nano-probe or spectro-nanoscopy to investigate heterogeneous samples. In this case, delivery of X-rays to the ROI of the specimen is inefficient for larger emittance source, and the beamline performance improves with the brilliance gain.
Applied Science and Convergence Technology 2022;31:71~74
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