Fig. 3. (a) Schematic, (b) reaction of Pd/Ta2O5/SiC hydrogen sensor with 120–5,000 ppm hydrogen at 300 °C, (c) preparation of the Pd/Ta₂O₅/SiC hydrogen sensor. Adapted with permission from [38], Copyrights 2021, Sensors. (d) Schematic and (e) reaction of AlGaN/GaN Schottky diode hydrogen sensor with 1,000 ppm and 1 % hydrogen. Adapted with permission from [39], Copyright 2021, Elsevier.

Applied Science and Convergence Technology 2022;31:79~84 https://doi.org/10.5757/ASCT.2022.31.4.79

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