ASCT로고
eISSN 2288-6559
Fig. 3.
Fig. 3. Transfer curves of (a) 9-nm channel with 2-hours annealing, (b) 6.5-nm channel with 2-hours annealing, and (c) 6.5-nm channel with 1-hour annealing.
Applied Science and Convergence Technology 2022;31:145~148 https://doi.org/10.5757/ASCT.2022.31.6.145
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd