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Fig. 5.
Fig. 5. (a) Schematic drawing shows UV sensing measurement. (b) SEM image is top view of the device. (c) and (d) are cross sectional SEM images obtained from 500A and 1200B samples, respectively. (e) UV photoresponse curves with respect to applied plasma powers and collection sites.
Applied Science and Convergence Technology 2022;31:149~152
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