Fig. 3. (a) Parratt’s approach. nj is the refractive index of the j-th layer, where n0 is for air and nN+1 is for the thick substrate. The first calculation starts at the interface between the N-th layer and substrate, where a multiple scattering within the substrate can be assumed to be zero due to its sufficient thickness. From the Fresnel reflectivity (RN) and transmittivity (TN) at z=ZN where the interface between the N-th layer and the substrate lies, finally
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