ASCT로고
eISSN 2288-6559
Table. 2.

Summary of the optical and electrical properties of Sn-doped ITO thin film. All the samples showed negative polarity for n-type material.

Type tITO [nm] TA[°C] tSn [nm] AVT [%] n(×1020) [/cm3] µ[cm2/V•s] ρ(×10−4) [Ω.cm] R[Ω/□]
A 170 260 0.0 92.3 6.41 22.66 4.30 23.86
1.0 93.1 15.0 19.91 2.09 12.27
2.0 92.3 21.0 11.54 2.51 14.79
B 170 400 0.0 92.6 7.27 18.61 4.61 30.74
1.0 93.8 18.9 18.96 1.74 10.26
2.0 93.3 8.37 30.42 2.45 14.41
C 400 400 0.0 89.6 3.01 34.22 6.05 15.14
1.0 90.6 5.20 36.06 3.33 8.32
2.0 89.4 8.68 30.57 2.35 5.88
Applied Science and Convergence Technology 2022;31:156~160 https://doi.org/10.5757/ASCT.2022.31.6.156
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd