Applied Science and Convergence Technology

Table 2

Summary of the optical and electrical properties of Sn-doped ITO thin film. All the samples showed negative polarity for n-type material.

Type	tITO [nm]	T_A[°C]	tSn [nm]	AVT [%]	n(×1020) [/cm3]	µ[cm²/V•s]	ρ(×10⁻⁴) [Ω.cm]	R_□[Ω/□]
A	170	260	0.0	92.3	6.41	22.66	4.30	23.86
			1.0	93.1	15.0	19.91	2.09	12.27
			2.0	92.3	21.0	11.54	2.51	14.79
B	170	400	0.0	92.6	7.27	18.61	4.61	30.74
			1.0	93.8	18.9	18.96	1.74	10.26
			2.0	93.3	8.37	30.42	2.45	14.41
C	400	400	0.0	89.6	3.01	34.22	6.05	15.14
			1.0	90.6	5.20	36.06	3.33	8.32
			2.0	89.4	8.68	30.57	2.35	5.88

Applied Science and Convergence Technology 2022;31:156~160 https://doi.org/10.5757/ASCT.2022.31.6.156