ASCT로고
eISSN 2288-6559
Fig. 1.
Fig. 1. (a) Mesh and three-dimensional (3-D) geometry used for HFCVD simulation and (b) schematic diagram of HFCVD system.
Applied Science and Convergence Technology 2023;32:7~11 https://doi.org/10.5757/ASCT.2023.32.1.7
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd