eISSN 2288-6559
Table. 2.

Boundary conditions applied in simulation.

Boundary Boundary condition Surface emissivity Material
Filament Steady Heat Flux 0.4 Tantalum
Chamber Isothermal (350 K) 0.1 N/A
Stainless steel Isothermal (350 K) 0.1 steel
Heat Shield Coupled 0.5 Copper
Worktable Coupled 0.5 Copper
Graphite Coupled 0.75 Graphite
Copper Coupled 0.1 Copper
Applied Science and Convergence Technology 2023;32:7~11
© Appl. Sci. Converg. Technol.

© The Korean Vacuum Society. All Rights Reserved. / Powered by INFOrang Co., Ltd