Fig. 2. Fabrication of graphene and GFET. (a) Scheme of the CVD method for synthesizing graphene. (b) TEM image of monolayered graphene (inset: SAED pattern of graphene). (c) Raman spectrum of monolayered graphene. (d) Schematic diagram of MEMS technology used to fabricate GFETs.

Applied Science and Convergence Technology 2023;32:30~33 https://doi.org/10.5757/ASCT.2023.32.1.30

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